PTFE wafer cassette, for 140*140mm, 18 slots, Robot-arm compatible, with built-in hooks

About PTFE wafer cassette, for 140*140mm, 18 slots, Robot-arm compatible, with built-in hooks

Product Overview

This specialized PTFE Wafer Basket is engineered for precision cleaning and etching of individual substrates or small batches. Unlike large-scale carriers, this compact, vertical-handle design allows operators to maintain maximum control during delicate dipping processes. The pure white PTFE construction ensures a "metal-free" environment, preventing the leaching of impurities that could compromise semiconductor electrical properties. Whether you are using the slotted rectangular base for edge-only contact or the perforated circular base for optimized fluid turbulence, these baskets provide a stable and non-reactive housing for high-value wafers.

Bespoke Customization Services

We specialize in tailoring these baskets to your specific wet-bench requirements:

• Custom Base Styles: Choose between a slotted V-bridge (for minimum contact) or a perforated disk (for maximum stability).

• Adjustable Handle Length: Handles can be extended or shortened to match the liquid levels of your specific PFA or PTFE cleaning tanks.

• Tailored Wafer Fit: Precision-sized for standard 1-inch to 8-inch wafers, or customized for square substrates and optical components.

• Multi-Slot Expansion: The base can be modified to hold multiple wafers in a parallel or back-to-back configuration.

Product Synergy & Workflow

Designed to integrate into a professional high-purity cleaning station:

• PFA/PTFE Cleaning Tanks: The vertical handle design is optimized for use in deep, narrow-mouth cleaning jars and tanks.

• Inert Hot Plates: Ideal for processes requiring heated chemical baths, as the PTFE material remains stable up to 260C.

• PTFE Tweezers: Used for the precise placement and removal of wafers from the basket slots without scratching the surface.

• PFA Fittings & Tubing: Essential for constructing the ultra-pure water (UPW) rinsing lines used after the chemical etch.

Application Fields & Industries

• R&D Laboratory Scale: Ideal for university research and small-scale pilot lines where individual wafer processing is required.

• Semiconductor Wet Etching: Safe handling during hydrofluoric acid (HF) dipping or buffered oxide etch (BOE) steps.

• MEMS & Micro-Optics: Processing of specialized sensors, sapphire windows, and quartz substrates.

• Thin-Film Deposition Prep: Ensuring a pristine, particle-free surface prior to CVD or PVD processes.

Exceptional Corrosion Resistance

Constructed from pure PTFE, our wafer cassette is engineered to endure harsh chemical environments typical in wafer processing. This property ensures extended product life and reliable protection for sensitive wafers during handling, making it an ideal choice for laboratories with demanding protocols.


Optimized for Robotic Automation

This cassette is specifically designed to be compatible with robot arms, making wafer transfer seamless and minimizing human contact. The built-in hooks allow for smooth robotic acquisition and transportation, supporting efficiency and consistent results within automated lab setups.


Contamination-Free Handling

Benefit from the inherent purity of PTFE, which eliminates the risk of wafer contamination. The cassette's design ensures wafers remain isolated from impurities throughout the processing lifecycle. This is particularly crucial for semiconductor and research labs focused on yielding uncontaminated results.